The TS Series is a versatile and configurable thin film measurement system that uses spectroscopic reflectometry to accurately determine optical and non-optical thin film thickness. This series is suitable for various semiconductor, medical and industrial applications.
The systems of the TM series measure anti-reflective coatings, anti-scratch coatings and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics. The thin film reflectometer system of the TM series can analyze the thickness of optical layers from 1nm to 250μm. A single thickness can be observed with 0.1 nm resolution, and single- or multi-layer films can be analyzed in less than a second.
Specifications:
- Easy operation and rapid measurement
- Multi-layer measurement
- Customer-requested Spectral Range can be customized
- Measurement of substrates such as steel, aluminum, brass, copper, ceramics and plastics
- Easy on-line and in-situ thickness measurements with flexible optical probe assemblies
Applications:
- Semiconductor process film
- In-Situ Measurements
- Optical coatings
- Measurement of rough surface coatings
