Plasma Monitoring Measurement System - PM Series

PM Series is a very useful system for plasma measurement with high sensitivity and Cooled detector. The PM series can detect plasma emission of wide spectrum and low stray light, including plasma monitoring, etching, and endpoint detection. Additionally, by monitoring the emission spectrum of a sample plasma, users can determine critical plasma parameters needed to control plasma-based processes.

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• Measuring the light coming from the plasma: real-time measurement outside or inside the chamber

• Generates a signal that can control the gas to be put into the plasma chamber: Prevents contamination through monitoring and induces

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• High Sensitivity, Large Dynamic Range, Back-thinned Cooled Detector, Low Stray Light

• Real Time Measurement: Initial detection by real time measurement

• Used for endpoint detection, fault detection, plasma process diagnosis, etc.

• Easy operation: Equipped with customized optics and optical head that can be conveniently combined with the plasma chamber

• Powerful plasma emission measurement method: Elemental analysis and precise control of plasma-based processes are possible, and it does not affect the process by measuring in the viewport outside the chamber

• Optional Resolution: Resolution varies depending on system configuration

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• Semiconductor, LCD/OLED

• Plasma Chamber State Control

• Fault Detection / Endpoint Control

• Other Processes using Plasma

• Plasma Etching / Plasma Ashing

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It is possible to monitor the change in plasma light emission when different gases are introduced into the plasma chamber by using the PM Series ( Plasma Monitoring System).

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The measurement is performed in a sealed reaction chamber, coupled to a spectrometer and Fiber Optics (+ optics products tailored to the measurement system can be supplied and manufactured) to (a) a viewport outside the chamber or (b) a viewport inside the chamber in a vacuum state. It is possible to monitor the light coming out of the plasma by measuring through the When measuring through fiber optics outside the chamber, a collimating lens can be attached in front of the fiber optics to collect the light from the plasma inside the chamber. If you install Fiber Optics inside the chamber, there is a high possibility that the inside Fiber Optics will be contaminated, so Intense can also provide a solution for this.